Characterization of surface forces for electro-mechanical memory cells

نویسنده

  • Woo-Young Choi
چکیده

By comparing experimental and simulation data, surface forces of electro-mechanical memory cells were characterized. In the case of aluminum beams, surface forces were negligible due to rough surface topology. However, in the case of titanium-nitride beams, surface force density was estimated to be 624 kPa. The extracted value of surface force can be fed back into the finite-element-analysis (FEA) simulation for better modeling accuracy.

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عنوان ژورنال:
  • IEICE Electronic Express

دوره 7  شماره 

صفحات  -

تاریخ انتشار 2010